Capacitance Diaphragm Gauge
Gas-independent capacitance manometer for accurate process pressure measurement.
Vacuum Gauges
Capacitance Diaphragm Gauge
The Capacitance Diaphragm Gauge provides highly accurate, gas-independent pressure measurement by sensing diaphragm deflection. Its excellent repeatability makes it the reference instrument for closed-loop pressure control in deposition and etch processes.
Key Features
- Gas-type independent measurement
- High accuracy and repeatability
- Heated versions for stable readings
- Analog and digital outputs
Applications
Process pressure controlEtch & depositionCalibration reference
Technical Specifications
| Product Type | Capacitance manometer |
|---|---|
| Operating Range | Full scale 0.1 to 1000 Torr |
| Accuracy | ±0.25% of reading |
| Material | Inconel diaphragm |
| Connection | KF / VCR |
| Power Requirement | ±15 V DC |
| Available Models | Ambient & heated |
| Support Available | Calibration, AMC |