Thermal Evaporation Coating Unit
Vacuum box coater for high-purity metal and dielectric evaporated films.
Thermal Evaporation Systems
Thermal Evaporation Coating Unit
The Thermal Evaporation Coating Unit produces high-purity films by resistively heating source materials in high vacuum. Fitted with a quartz crystal thickness monitor, multiple sources and substrate rotation, it delivers repeatable metallisation and optical coatings.
Key Features
- Multiple resistive sources
- Quartz crystal thickness monitor
- Substrate rotation and shutter
- Optional e-beam source upgrade
Applications
Electrode depositionOptical mirrorsContact metallisationOLED research
Technical Specifications
| Product Type | Thermal evaporation coater |
|---|---|
| Base Pressure | 1×10⁻⁶ mbar |
| Chamber Size | 300 – 500 mm bell jar |
| Sources | 2 – 4 LT supplies |
| Power Requirement | 415 V, 3-phase |
| Thickness Monitor | Digital QCM |
| Available Models | Thermal & hybrid e-beam |
| Support Available | Installation, AMC, spares |