Thermal Mass Flow Controller
Precise digital gas flow control for reactive deposition and process gas delivery.
Mass Flow Controllers
Thermal Mass Flow Controller
The Thermal Mass Flow Controller delivers accurate, repeatable gas flow into vacuum and process systems using thermal sensing with an integrated control valve. Calibrated per gas and range, it suits reactive sputtering, CVD and gas sensing duties.
Key Features
- Digital and analog setpoint control
- Gas-specific factory calibration
- Fast settling time
- Wide range of flow ratings
Applications
Reactive sputteringCVD gas deliveryGas sensor testing
Technical Specifications
| Product Type | Thermal mass flow controller |
|---|---|
| Flow Range | 5 sccm – 50 slm |
| Accuracy | ±1% of full scale |
| Material | SS316L wetted parts |
| Connection | VCR / compression |
| Power Requirement | ±15 V DC |
| Available Models | Analog & digital bus |
| Support Available | Calibration, AMC |