Turbomolecular Pump
High-vacuum pump achieving UHV pressures for demanding analytical and research systems.
Vacuum Pumps
Turbomolecular Pump
The Turbomolecular Pump delivers high and ultra-high vacuum by accelerating gas molecules with high-speed rotor blades. Backed by a suitable primary pump, it provides clean, vibration-free pumping for surface science, mass spectrometry and thin-film deposition systems.
Key Features
- Ultimate pressure into the UHV range
- Integrated or external drive electronics
- Hybrid or magnetic bearing options
- Wide range of inlet flange sizes
Applications
UHV researchSurface analysisThin film depositionMass spectrometry
Technical Specifications
| Product Type | Turbomolecular pump |
|---|---|
| Operating Range | 1×10⁻³ to 1×10⁻¹⁰ mbar |
| Pumping Speed | 60 – 2000 l/s |
| Material | Aluminium rotor, stainless housing |
| Inlet Connection | ISO-K / CF |
| Power Requirement | 24–48 V DC drive |
| Available Models | Hybrid & magnetic bearing |
| Support Available | Installation, AMC, spares |